Scaling Fabrication Methods from Micro to Nano

Micro to Nano – Scaling Packaging Technologies for Future Microsystems

As the development of microelectronics is still driving towards further miniaturization new materials, processes and technologies are crucial for the realization of future cost effective microsystems and components. These future systems will not only consist of SMDs and ICs assembled on a substrate, but will potentially integrate also living cells, organelles, nanocrystals, tubules and other ti...

Soft lithographic methods for nano-fabrication

Soft l i thography is a low-cost, non-photolithographic strategy for carrying out micloand nano-fabrication. This unconventional approach consists oftechniques based on self-assembly and replica moiding oforganic molecules and polyneric marerialsFour such techniques, microcontact printing (ICP). replica molding. micromolding in capil laries (MIMIC), and microtransfer molding (ITM ). have been d...

Three Dimensional Micro/Nano-structure Fabrication of Phase-change Film

Department of Electrical and Computer Engineering, National University of Singapore, 1 Engineering Drive 3, Singapore 117576 2 Data Storage Institute, DSI Building, 5 Engineering Drive 1, Singapore 117608 3 Nanoscience & Nanotechnology Initiative, National University of Singapore, 2 Engineering Drive 3, Singapore 117576 4 Department of Mechanical Engineering, National University of Singapore, 2...

Micro and nano-fabrication of biodegradable polymers for drug delivery.

This paper presents state-of-the-art micro and nano-fabrication techniques for biodegradable polymers. Replication molding, using a rigid or elastic master, can pattern structures on a polymer surface in a submicron resolution at a low cost. Layer-by-layer rapid prototyping methods are promising in producing controlled release units with complicated geometries, release mechanisms and the abilit...

Fabrication of 3d Micro-architected/ Nano-architected Materials